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金属-介质-金属薄膜系统中表面形貌对光学性质的影响。

Effect of surface morphology on the optical properties in metal-dielectric-metal thin film systems.

机构信息

Institute of Materials Research and Engineering, Agency for Science, Technology and Research (A*STAR), 3 Research Link, Singapore 117602, Singapore.

出版信息

ACS Appl Mater Interfaces. 2011 Apr;3(4):1148-53. doi: 10.1021/am101278q. Epub 2011 Mar 22.

Abstract

The effect of surface morphology on the optical properties in a metal-dielectric-metal (MDM) thin film was investigated. Ag films were thermally evaporated at different rates to obtain different surface roughnesses and grain sizes. The reflectance spectra of the Ag/MgF(2)/Ag films show a dip due to surface-roughness-induced excitation of surface plasmon polaritons. The dip position varies from 650 to 800 nm, depending on the surface morphology of the multilayered film. An empirical relationship was found between the optical properties (i.e., the dip position and its linewidth) and the Ag film structural properties (i.e., surface roughness, grain size, and filling factor). The causes of and contributions to the shift of the dip position and the linewidth of the dip were discussed. The study is important to metal-dielectric-based structures, and the unique feature of such a MDM film could be used for color filters.

摘要

研究了金属-介质-金属(MDM)薄膜中表面形貌对光学性质的影响。通过在不同速率下热蒸发 Ag 膜来获得不同的表面粗糙度和晶粒尺寸。Ag/MgF2/Ag 薄膜的反射谱由于表面粗糙度诱导的表面等离激元极化激元的激发出现了一个凹陷。凹陷的位置从 650nm 到 800nm 变化,这取决于多层膜的表面形貌。发现光学性质(即凹陷位置及其线宽)与 Ag 膜结构性质(即表面粗糙度、晶粒尺寸和填充因子)之间存在经验关系。讨论了凹陷位置和凹陷线宽偏移的原因和贡献。这项研究对于基于金属-介质的结构非常重要,这种 MDM 膜的独特特征可用于彩色滤光片。

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