Institute of Materials Science and Mechanics of Materials, Technische Universität München, Garching, Germany.
J Microsc. 2011 Aug;243(2):206-19. doi: 10.1111/j.1365-2818.2011.03495.x. Epub 2011 Mar 28.
Preparation of specimens for electron backscatter diffraction has to be done with great care to ensure a high indexing fraction from high-quality patterns. Despite the amount of published and recommended preparation methods for different materials, detailed information about the preparation parameters are either missing, or different preparation methods are recommended for one material. The aim of this contribution is to compare the application of several preparation techniques on different metallic samples to determine a suitable preparation method for high-quality electron backscatter diffraction measurements for a variety of alloys. From the results obtained, polishing with an oxide polishing suspension is the most appropriate preparation method for the materials and preparation methods investigated. Furthermore, the influence of mechanical polishing as well as of oxide polishing suspension polishing on misorientation is found to be negligible for misorientation angles greater than 1°. In the course of this study the absolute indexing reproducibility of the EBSD-system employed was determined to be 1.18° with respect to the misorientation angle θ.
制备用于电子背散射衍射的样品时必须非常小心，以确保从高质量花样中获得高的指数分数。尽管已经发表了许多针对不同材料的推荐制备方法，但关于制备参数的详细信息要么缺失，要么针对一种材料推荐了不同的制备方法。本研究的目的是比较几种制备技术在不同金属样品上的应用，以确定一种适用于各种合金的高质量电子背散射衍射测量的制备方法。从获得的结果来看，对于所研究的材料和制备方法，使用氧化抛光悬浮液进行抛光是最合适的制备方法。此外，发现机械抛光和氧化抛光悬浮液抛光对取向差大于 1°的影响可以忽略不计。在本研究过程中，确定所使用的 EBSD 系统的绝对索引重现性相对于取向差θ为 1.18°。
