用于磁场测量的微纳加工原子蒸气室阵列

Microfabricated atomic vapor cell arrays for magnetic field measurements.

作者信息

Woetzel S, Schultze V, Ijsselsteijn R, Schulz T, Anders S, Stolz R, Meyer H-G

机构信息

Institute of Photonic Technology, Albert-Einstein-Str. 9, D-07745 Jena, Germany.

出版信息

Rev Sci Instrum. 2011 Mar;82(3):033111. doi: 10.1063/1.3559304.

DOI:10.1063/1.3559304

PMID:21456722

Abstract

We describe a method for charging atomic vapor cells with cesium and buffer gas. By this, it is possible to adjust the buffer gas pressure in the cells with good accuracy. Furthermore, we present a new design of microfabricated vapor cell arrays, which combine silicon wafer based microfabrication and ultrasonic machining to achieve the arrays of thermally separated cells with 50 mm(3) volume. With cells fabricated in the outlined way, intrinsic magnetic field sensitivities down to 300 fT∕Hz(1∕2) are reached.

摘要

我们描述了一种向铯原子蒸汽室充入铯和缓冲气体的方法。通过这种方法，可以高精度地调节蒸汽室内的缓冲气体压力。此外，我们还展示了一种新型的微加工蒸汽室阵列设计，该设计结合了基于硅片的微加工和超声加工技术，以实现体积为50立方毫米的热隔离细胞阵列。采用上述方法制造的细胞，其固有磁场灵敏度可低至300 fT∕Hz(1∕2)。