通过热灯丝化学气相沉积和场发射效应在多孔阳极氧化铝上低成本制造金刚石纳米尖端。

Low cost fabrication of diamond nano-tips on porous anodic alumina by hot filament chemical vapor deposition and the field emission effects.

机构信息

Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu City, Taiwan.

出版信息

Nanotechnology. 2011 Jun 10;22(23):235301. doi: 10.1088/0957-4484/22/23/235301. Epub 2011 Apr 7.

Abstract

A novel growth method for diamond nano-tips on porous anodic alumina (PAA) by hot filament chemical vapor deposition has been investigated for the first time. Before diamond film deposition could be carried out, nano-diamond particles were deposited onto the pore surface of PAA by electrophoretic deposition at the nucleation sites. Diamond nano-tips were then successfully formed by the shape of porous alumina. The results show that a diamond nano-tip with a smaller radius has superior effects of field emission. Its threshold field and current density are 1.2 V µm(-1) and 4.0 mA cm(-2), respectively, for the case of a tip radius of about 20-30 nm.

摘要

首次研究了在多孔阳极氧化铝（PAA）上通过热丝化学气相沉积生长金刚石纳米尖端的新方法。在进行金刚石薄膜沉积之前，通过在成核点处的电泳沉积将纳米金刚石颗粒沉积到 PAA 的孔表面上。然后，通过多孔氧化铝的形状成功形成了金刚石纳米尖端。结果表明，半径较小的金刚石纳米尖端具有更好的场发射效果。对于半径约为 20-30nm 的尖端，其阈值场和电流密度分别为 1.2V µm(-1)和 4.0mA cm(-2)。