Department of Materials Science and Engineering, Korea University, Anam-Dong 5-1, Seoungbuk-Ku, Seoul 136-713, Korea.
Nanotechnology. 2010 Dec 17;21(50):505302. doi: 10.1088/0957-4484/21/50/505302. Epub 2010 Nov 22.
Micron-sized and precise patterns of nanocrystalline CVD diamond were fabricated successfully on substrates using dispersed nanodiamond particles, charge connection by electrostatic self-assembly, and photolithography processes. Nanodiamond particles which had been dispersed using an attritional milling system were attached electrostatically on substrates as nuclei for diamond growth. In this milling process, poly sodium 4-styrene sulfonate (PSS) was added as an anionic dispersion agent to produce the PSS/nanodiamond conjugates. Ultra dispersed nanodiamond particles with a ζ-potential and average particle size of - 60.5 mV and ∼ 15 nm, respectively, were obtained after this milling process. These PSS/nanodiamond conjugates were attached electrostatically to a cationic polyethyleneimine (PEI) coated surface on to which a photoresist had been patterned in an aqueous solution of the PSS/nanodiamond conjugated suspension. A selectively seeded area was formed successfully using the above process. A hot filament chemical vapor deposition system was used to synthesize the nanocrystalline CVD diamond on the seeded area. Micron-sized, thin and precise nanocrystalline CVD diamond patterns with a high nucleation density (3.8 ± 0.4 × 10(11) cm(-2)) and smooth surface were consequently fabricated.
使用分散的纳米金刚石颗粒、静电自组装和光刻工艺，成功地在基底上制造出具有微米级和精确图案的纳米晶 CVD 金刚石。使用磨损式研磨系统分散的纳米金刚石颗粒通过静电附着在基底上作为金刚石生长的核。在这个研磨过程中，加入聚 4-苯乙烯磺酸钠（PSS）作为阴离子分散剂来制备 PSS/纳米金刚石缀合物。经过这个研磨过程，得到了 ζ 电位为-60.5 mV、平均粒径约为 15nm 的超分散纳米金刚石颗粒。这些 PSS/纳米金刚石缀合物通过静电附着在涂有阳离子聚乙烯亚胺（PEI）的表面上，该表面上已经在 PSS/纳米金刚石缀合物悬浮液的水溶液中形成了图案的光致抗蚀剂。使用上述工艺成功地形成了选择性的种子区域。使用热丝化学气相沉积系统在种子区域上合成纳米晶 CVD 金刚石。随后成功制造出具有高成核密度（3.8±0.4×10(11)cm(-2))和光滑表面的微米级、薄且精确的纳米晶 CVD 金刚石图案。
