Wu Jing, Day Daniel, Gu Min
Centre for Micro-Photonics, Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn, PO Box 218, Victoria 3122, Australia.
Appl Opt. 2011 May 1;50(13):1843-9. doi: 10.1364/AO.50.001843.
We present a polymeric-based Fabry-Perot optofluidic sensor fabricated by combining direct laser machining and hot embossing. This technique provides a more elegant solution to conventional hot embossing by increasing the production rate, improving the reproducibility, and further reducing the cost, providing a large working area and flexibility in design modification and customization. As a proof of concept, a Fabry-Perot (F-P) optofluidic sensor was fabricated in polymethyl methacrylate (PMMA) from a micromachined stamp. The experimental results of the sensor agree well with analytical calculations and show a sensitivity of 2.13×10⁻³ RIU/nm for fluid refractive index change.
我们展示了一种通过结合直接激光加工和热压印制造的基于聚合物的法布里-珀罗光流体传感器。该技术通过提高生产率、改善再现性并进一步降低成本，为传统热压印提供了更出色的解决方案，提供了较大的工作区域以及设计修改和定制的灵活性。作为概念验证，利用微加工印章在聚甲基丙烯酸甲酯（PMMA）中制造了一个法布里-珀罗（F-P）光流体传感器。该传感器的实验结果与分析计算结果吻合良好，并且显示出对于流体折射率变化的灵敏度为2.13×10⁻³ RIU/nm。
