Department of Biomedical Engineering, Zhejiang University, Hangzhou, People's Republic of China.
Nanotechnology. 2011 Jul 1;22(26):265504. doi: 10.1088/0957-4484/22/26/265504. Epub 2011 May 17.
Humidity detection has been widely used in a variety of fields. A humidity sensor with high sensitivity is reported in this paper. A surface acoustic wave resonator (SAWR) with high resonance frequency was fabricated as a basic sensitive component. Various nanotechnologies were used to improve the sensor's performance. A multi-walled carbon nanotube/Nafion (MWCNT/Nafion) composite material was prepared as humidity-sensitive films, deposited on the surface of an SAWR by the electrospinning method. The electrospun MWCNT/Nafion nanofiber films showed a three-dimensional (3D) porous structure, which was profitable for improving the sensor's performance. The new nano-water-channel model of Nafion was also applied in the humidity sensing process. Compared to other research, the present sensor showed excellent sensitivity (above 400 kHz/% relative humidity (RH) in the range from 10% RH to 80% RH), good linearity (R(2) > 0.98) and a short response time (∼3 s@63%).
湿度检测已被广泛应用于多种领域。本文报道了一种灵敏度高的湿度传感器。采用高共振频率的声表面波谐振器(SAWR)作为基本敏感元件。采用各种纳米技术来提高传感器的性能。将多壁碳纳米管/全氟磺酸膜(MWCNT/Nafion)复合材料通过静电纺丝法制备成湿敏薄膜，沉积在 SAWR 表面。电纺 MWCNT/Nafion 纳米纤维薄膜呈现出三维(3D)多孔结构，有利于提高传感器的性能。在湿度传感过程中，还应用了新型的 Nafion 纳米水道模型。与其他研究相比，该传感器表现出优异的灵敏度(在 10% RH 至 80% RH 范围内，超过 400 kHz/%相对湿度(RH))、良好的线性度(R(2)>0.98)和较短的响应时间(∼3 s@63%)。
