Department of Electrical Engineering and California Nano-Systems Institute, University of California at Los Angeles, Los Angeles, California 90095, United States.
Nano Lett. 2011 Jun 8;11(6):2242-6. doi: 10.1021/nl200355d. Epub 2011 May 18.
We report on the formation and optical properties of bottom-up photonic crystal (PC) cavities formed by III-V nanopillars (NPs) via catalyst-free selective-area metal-organic chemical vapor deposition on masked GaAs substrates. This method of NP synthesis allows for precise lithographic control of NP position and diameter enabling simultaneous formation of both the photonic band gap (PBG) region and active gain region. The PBG and cavity resonance are determined by independently tuning the NP radius r, pitch a, and height h in the respective masked areas. Near-infrared emission at 970 nm is achieved from axial GaAs/InGaAs heterostructures with in situ passivation by laterally grown InGaP shells. To achieve out-of-plane optical confinement, the PC cavities are embedded in polydimethylsiloxane (PDMS) and removed from the growth substrate. Spatially and spectrally resolved 77 K photoluminescence demonstrates a strong influence of the PBG resonance on device emission. Resonant peaks are observed in the emission spectra of PC cavities embedded in PDMS.
我们报告了通过无催化剂选择区域金属有机化学气相沉积在掩蔽 GaAs 衬底上形成的 III-V 纳米柱(NP)的自下而上光子晶体(PC)腔的形成和光学性质。这种 NP 合成方法允许对 NP 位置和直径进行精确的光刻控制,从而能够同时形成光子带隙(PBG)区域和有源增益区域。通过在各自的掩蔽区域中独立调整 NP 半径 r、间距 a 和高度 h,可以确定 PBG 和腔共振。轴向 GaAs/InGaAs 异质结构在侧向生长的 InGaP 壳的原位钝化下实现了 970nm 的近红外发射。为了实现面外光学限制,将 PC 腔嵌入聚二甲基硅氧烷(PDMS)中并从生长衬底中取出。在 77K 下进行的空间和光谱分辨光致发光表明 PBG 共振对器件发射有很强的影响。在嵌入 PDMS 的 PC 腔的发射光谱中观察到了共振峰。