Department of Electrical Engineering and California NanoSystems Institute, University of California at Los Angeles, Los Angeles, California 90095, United States.
Nano Lett. 2011 Dec 14;11(12):5387-90. doi: 10.1021/nl2030163. Epub 2011 Nov 18.
The directed growth of III-V nanopillars is used to demonstrate bottom-up photonic crystal lasers. Simultaneous formation of both the photonic band gap and active gain region is achieved via catalyst-free selective-area metal-organic chemical vapor deposition on masked GaAs substrates. The nanopillars implement a GaAs/InGaAs/GaAs axial double heterostructure for accurate, arbitrary placement of gain within the cavity and lateral InGaP shells to reduce surface recombination. The lasers operate single-mode at room temperature with low threshold peak power density of ∼625 W/cm2. Cavity resonance and lasing wavelength is lithographically defined by controlling pillar pitch and diameter to vary from 960 to 989 nm. We envision this bottom-up approach to pillar-based devices as a new platform for photonic systems integration.
采用定向生长 III-V 纳米柱的方法来演示自下而上的光子晶体激光器。通过在掩模版 GaAs 衬底上无催化剂选择性区域的金属有机化学气相沉积,同时形成光子带隙和有源增益区。纳米柱采用 GaAs/InGaAs/GaAs 轴向双异质结构,可精确、任意地将增益放置在腔体内,并且采用横向 InGaP 壳来减少表面复合。这些激光器在室温下以低阈值峰值功率密度约为 625 W/cm2 实现单模运转。通过控制纳米柱的间距和直径,从 960nm 到 989nm 变化,可通过光刻来定义腔共振和激光波长。我们期望这种基于纳米柱的自下而上的方法成为光子系统集成的新平台。