Sreenivas G, Ang S S, Fritsch I, Brown W D, Gerhardt G A, Woodward D J
Departments of Electrical Engineering and Chemistry and Biochemistry, University of Arkansas, Fayetteville, Arkansas 72701, Departments of Pharmacology and Psychiatry and Rocky Mountain Center for Sensor Technology, University of Colorado Health Sciences Center, Denver, Colorado 80262, and Department of Physiology and Pharmacology, Bowman Gray School of Medicine, Wake Forest University, Winston-Salem, North Carolina 27157.
Anal Chem. 1996 Jun 1;68(11):1858-64. doi: 10.1021/ac9508816.
This paper describes a robust and reliable process for fabricating a novel sputter-deposited, thin-film carbon microelectrode array using standard integrated circuit technologies and silicon micromachining. Sputter-deposited carbon films were investigated as potential candidates for microelectrode materials. The surface properties and cross section of the microelectrode arrays were studied by atomic force microscopy and scanning electron microscopy, respectively. Electrical site impedance, crosstalk, and lifetime (dielectric integrity) of microelectrodes in the array were characterized. Electrochemical response of the microelectrodes to hexaammineruthenium(III) chloride and dopamine were investigated by fast-scan cyclic voltammetry and high-speed, computer-based chronoamperometry; results show that thin-film carbon microelectrodes are well-behaved electrochemically. The thin carbon films offer extremely good electrical, mechanical, and chemical properties and thus qualify as viable candidates for various electroanalytical applications, particularly acute neurophysiological studies.
本文描述了一种稳健且可靠的工艺，用于使用标准集成电路技术和硅微加工制造一种新型的溅射沉积薄膜碳微电极阵列。对溅射沉积的碳膜作为微电极材料的潜在候选者进行了研究。分别通过原子力显微镜和扫描电子显微镜研究了微电极阵列的表面特性和横截面。对阵列中微电极的电位点阻抗、串扰和寿命（介电完整性）进行了表征。通过快速扫描循环伏安法和基于计算机的高速计时电流法研究了微电极对氯化六氨合钌(III)和多巴胺的电化学响应；结果表明薄膜碳微电极具有良好的电化学性能。薄碳膜具有极其优异的电学、机械和化学性能，因此有资格作为各种电分析应用的可行候选材料，特别是急性神经生理学研究。
