Schröder Sven, Duparré Angela, Coriand Luisa, Tünnermann Andreas, Penalver Dayana H, Harvey James E
Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany.
Opt Express. 2011 May 9;19(10):9820-35. doi: 10.1364/OE.19.009820.
The light scattering of rough metallic surfaces with roughness levels ranging from a few to several hundred nanometers is modeled and compared to experimental data. Different modeling approaches such as the classical Rayleigh-Rice vector perturbation theory and the new Generalized Harvey-Shack theory are used and critically assessed with respect to ranges of validity, accuracy, and practicability. Based on theoretical calculations and comparisons with Rigorous Coupled Wave Analysis for sinusoidal phase gratings, it is demonstrated that the approximate scatter models yield surprisingly accurate results and at the same time provide insight into light scattering phenomena. For stochastically rough metal surfaces, the predicted angles resolved scattering is compared to experimental results at 325 nm, 532 nm, and 1064 nm. In addition, the possibilities of retrieving roughness information from measured scattering data for different roughness regimes are discussed.
对粗糙度从几纳米到几百纳米不等的粗糙金属表面的光散射进行了建模，并与实验数据进行了比较。使用了不同的建模方法，如经典的瑞利 - 赖斯矢量微扰理论和新的广义哈维 - 沙克理论，并就有效性范围、准确性和实用性进行了严格评估。基于理论计算以及与正弦相位光栅的严格耦合波分析的比较，结果表明近似散射模型能得出惊人准确的结果，同时还能深入了解光散射现象。对于随机粗糙的金属表面，将预测的角度分辨散射与325纳米、532纳米和1064纳米处的实验结果进行了比较。此外，还讨论了从不同粗糙度状态下测量的散射数据中获取粗糙度信息的可能性。
