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粗糙表面的软X射线散射:实验与理论分析。

Soft x-ray scattering from rough surfaces: experimental and theoretical analysis.

作者信息

Hogrefe H, Kunz C

出版信息

Appl Opt. 1987 Jul 15;26(14):2851-9. doi: 10.1364/AO.26.002851.

DOI:10.1364/AO.26.002851
PMID:20489971
Abstract

Specularly reflected and scattered radiation was measured at lambda = 50, 100, 200 A from artificially roughened flat mirrors and from thick vacuum evaporated Au samples. The results of the roughened samples are in reasonable agreement with Beckmann's scalar theory using an exponential autocorrelation function. The angle-dependent scattering distributions at different angles of incidence and different wavelengths are described with a unique mean roughness and autocorrelation length. Some small discrepancies remain because the scalar theory does not take into account the optical constants of the scattering surface. The use of vector theory in its simplest analytical form is not successful; however, it provides a means to qualitatively correct the scalar theory for the influence of the actual optical constants in agreement with our experiments. The thick Au films are roughened by surface crystallization and yield completely different scattering distributions. These results could not be fitted to scalar theory, either with an exponential or a Gaussian autocorrelation function.

摘要

在波长λ = 50、100、200埃处,测量了来自人工粗糙化平面反射镜和厚真空蒸发金样品的镜面反射和散射辐射。粗糙化样品的结果与使用指数自相关函数的贝克曼标量理论相当吻合。不同入射角和不同波长下的角度相关散射分布用唯一的平均粗糙度和自相关长度来描述。由于标量理论没有考虑散射表面的光学常数,仍存在一些小的差异。使用最简单解析形式的矢量理论并不成功;然而,它提供了一种方法,可根据我们的实验,定性地校正标量理论中实际光学常数的影响。厚金膜因表面结晶而粗糙化,并产生完全不同的散射分布。这些结果无论是用指数自相关函数还是高斯自相关函数,都无法与标量理论拟合。

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