Griffin Brendan J
Centre for Microscopy, Characterisation and Analysis, The University of Western Australia, Crawley, Western Australia.
Scanning. 2011 May-Jun;33(3):162-73. doi: 10.1002/sca.20255. Epub 2011 Jun 21.
The secondary electron (SE) imaging of several samples across a range of scanning electron microscopes (SEM) and SE detectors under matched operating conditions has generated a highly variable image data set. Using microanalytical conditions (10-15 kV), images from in-column SE detectors reveal the presence of surface films and contaminants that are invisible to conventional Everhart-Thornley SE detectors under the same conditions. Data from studying the effects of working distance, the image resolution derived through contrast transfer function analysis and electrostatic mirror imaging of the SE detectors in operation combine with other studies to suggest that the classically defined SE1 component can be separated from other SE components. SE images obtained by tailored mechanical design and energy-filtering will provide SE images with probe-sized resolution and dominated by surface detail currently only seen in low-voltage SEM, potentially even from thermionic-sourced columns.
在匹配的操作条件下，使用一系列扫描电子显微镜（SEM）和二次电子（SE）探测器对多个样品进行二次电子成像，生成了一个高度可变的图像数据集。在微分析条件（10 - 15千伏）下，来自柱内SE探测器的图像显示出在相同条件下传统的埃弗哈特 - 索恩利SE探测器不可见的表面膜和污染物的存在。关于工作距离影响的研究数据、通过对比度传递函数分析得出的图像分辨率以及运行中的SE探测器的静电镜成像数据，与其他研究相结合，表明经典定义的SE1分量可以与其他SE分量分离。通过定制机械设计和能量过滤获得的SE图像将提供具有探针尺寸分辨率且以目前仅在低电压SEM中才能看到的表面细节为主的SE图像，甚至可能来自热离子源柱。
