Suri A, Pratt A, Tear S, Walker C, El-Gomati M
Department of Electronic Engineering, University of York, York, U.K.
Department of Physics, University of York, York, U.K.
J Microsc. 2020 Sep;279(3):207-211. doi: 10.1111/jmi.12867. Epub 2020 Feb 17.
We report the working of a novel detector design based on a Bessel Box (BB) electron energy analyser in a scanning electron microscope (SEM). We demonstrate the application of our detector for elemental identification through Auger electron detection in an SEM environment and its potential as a complementary technique to energy dispersive X-ray (EDX) spectroscopy. We also demonstrate energy-filtered secondary electron imaging of a copper-on-silicon sample using an electron pass energy of 12 eV. LAY DESCRIPTION: Advancements in the field of the Scanning Electron Microscopy have been one of the major nanotechnology enablers. A Scanning Electron Microscope (SEM) generates a magnified image of the sample by bombarding it with an electron beam and detecting the electrons that scatter off the surface along with the electrons that are generated in the sample. Conventional detectors such as the Everhart-Thornley detector (ET) or through-the-lens (TTL) detectors, either offer little to no energy analysis (ET) or limited energy filtering capability (e.g the low-pass energy filter in TTL). This information is crucial to interpret the image of the sample under study. What is needed is a smart and compact detector that can detect electrons and furnish energy inside the SEM chamber. Here, we report a novel secondary electron (SE) detector design with energy analysis capability for use in scanning electron microscopes. The detector is based on the design of a Bessel Box (BB) energy analyser. We have designed and experimentally tested it in an SEM environment. The band-pass filter action of the detector enables the BB to be operated at a selected energy and allows a narrow window of energies to be detected for generating energy-filtered images.
我们报告了一种基于贝塞尔盒（BB）电子能量分析仪的新型探测器设计在扫描电子显微镜（SEM）中的工作情况。我们展示了该探测器在扫描电子显微镜环境中通过俄歇电子检测进行元素识别的应用，以及它作为能量色散X射线（EDX）光谱补充技术的潜力。我们还展示了使用12电子伏特的电子通过能量对硅上铜样品进行能量过滤二次电子成像。 层面描述：扫描电子显微镜领域的进步一直是主要的纳米技术推动因素之一。扫描电子显微镜（SEM）通过用电子束轰击样品并检测从表面散射的电子以及样品中产生的电子来生成样品的放大图像。传统探测器，如埃弗哈特 - 索恩利探测器（ET）或透过透镜（TTL）探测器，要么几乎不提供能量分析（ET），要么能量过滤能力有限（例如TTL中的低通能量滤波器）。这些信息对于解释所研究样品的图像至关重要。所需要的是一种能够在扫描电子显微镜腔内检测电子并提供能量的智能紧凑型探测器。在这里，我们报告了一种用于扫描电子显微镜的具有能量分析能力的新型二次电子（SE）探测器设计。该探测器基于贝塞尔盒（BB）能量分析仪的设计。我们已经在扫描电子显微镜环境中对其进行了设计和实验测试。探测器的带通滤波器作用使BB能够在选定的能量下运行，并允许检测窄能量窗口以生成能量过滤图像。
