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PMN-PT 单晶聚焦换能器采用机械压坑技术制造。

PMN-PT single crystal focusing transducer fabricated using a mechanical dimpling technique.

机构信息

Department of Applied Physics, The Hong Kong Polytechnic University, Hunghom, Hong Kong, PR China.

出版信息

Ultrasonics. 2012 Jan;52(1):20-4. doi: 10.1016/j.ultras.2011.06.004. Epub 2011 Jun 14.

Abstract

A ∼5MHz focusing PMN-PT single crystal ultrasound transducer has been fabricated utilizing a mechanical dimpling technique, where the dimpled crystal wafer was used as an active element of the focusing transducer. For the dimpled focusing transducer, the effective electromechanical coupling coefficient was enhanced significantly from 0.42 to 0.56. The dimpled transducer also yields a -6dB bandwidth of 63.5% which is almost double the bandwidth of the plane transducer. An insertion loss of the dimpled transducer (-18.1dB) is much lower than that of the plane transducer. Finite element simulation also reveals specific focused beam from concave crystal surface. These promising results show that the dimpling technique can be used to develop high-resolution focusing single crystal transducers.

摘要

利用机械压痕技术制作了一个工作频率约为 5MHz 的PMN-PT 单晶超声聚焦换能器,其中压痕晶片被用作聚焦换能器的有源元件。对于压痕聚焦换能器,有效机电耦合系数从 0.42 显著提高到 0.56。压痕换能器还产生了 -6dB 带宽为 63.5%,几乎是平面换能器带宽的两倍。压痕换能器的插入损耗(-18.1dB)明显低于平面换能器。有限元模拟还揭示了凹面晶体表面的特定聚焦波束。这些有希望的结果表明,压痕技术可用于开发高分辨率聚焦单晶换能器。

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