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一种20兆赫兹宽带PMN-PT单晶相控阵超声换能器的研制。

Development of a 20-MHz wide-bandwidth PMN-PT single crystal phased-array ultrasound transducer.

作者信息

Wong Chi-Man, Chen Yan, Luo Haosu, Dai Jiyan, Lam Kwok-Ho, Chan Helen Lai-Wa

机构信息

Department of Electrical Engineering, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong.

Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hom, Kowloon, Hong Kong.

出版信息

Ultrasonics. 2017 Jan;73:181-186. doi: 10.1016/j.ultras.2016.09.012. Epub 2016 Sep 12.

Abstract

In this study, a 20-MHz 64-element phased-array ultrasound transducer with a one-wavelength pitch is developed using a PMN-30%PT single crystal and double-matching layer scheme. High piezoelectric (d>1000pC/N) and electromechanical coupling (k>0.8) properties of the single crystal with an optimized fabrication process involving the photolithography technique have been demonstrated to be suitable for wide-bandwidth (⩾70%) and high-sensitivity (insertion loss ⩽30dB) phased-array transducer application. A -6dBbandwidth of 91% and an insertion loss of 29dBfor the 20-MHz 64-element phased-array transducer were achieved. This result shows that the bandwidth is improved comparing with the investigated high-frequency (⩾20MHz) ultrasound transducers using piezoelectric ceramic and single crystal materials. It shows that this phased-array transducer has potential to improve the resolution of biomedical imaging, theoretically. Based on the hypothesis of resolution improvement, this phased-array transducer is capable for small animal (i.e. mouse and zebrafish) studies.

摘要

在本研究中,采用PMN-30%PT单晶和双匹配层方案研制了一种具有单波长间距的20MHz 64阵元相控阵超声换能器。通过光刻技术等优化制造工艺,该单晶展现出高压电性能(d>1000pC/N)和机电耦合性能(k>0.8),已证明其适用于宽带宽(⩾70%)和高灵敏度(插入损耗⩽30dB)的相控阵换能器应用。20MHz 64阵元相控阵换能器实现了91%的-6dB带宽和29dB的插入损耗。该结果表明,与使用压电陶瓷和单晶材料的已研究高频(⩾20MHz)超声换能器相比,带宽有所提高。理论上,这表明该相控阵换能器有潜力提高生物医学成像的分辨率。基于分辨率提高的假设,该相控阵换能器适用于小动物(即小鼠和斑马鱼)研究。

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