Boudaoud Mokrane, Haddab Yassine, Le Gorrec Yann, Lutz Philippe
FEMTO-ST Institute, UMR CNRS 6174-UFC/ENSMM/UTBM Automatic Control and Micro-Mechatronic Systems Department (AS2M), Besançon, France.
Rev Sci Instrum. 2012 Jan;83(1):013704. doi: 10.1063/1.3673637.
The atomic force microscope (AFM) is a powerful tool for the measurement of forces at the micro/nano scale when calibrated cantilevers are used. Besides many existing calibration techniques, the thermal calibration is one of the simplest and fastest methods for the dynamic characterization of an AFM cantilever. This method is efficient provided that the Brownian motion (thermal noise) is the most important source of excitation during the calibration process. Otherwise, the value of spring constant is underestimated. This paper investigates noise interference ranges in low stiffness AFM cantilevers taking into account thermal fluctuations and acoustic pressures as two main sources of noise. As a result, a preliminary knowledge about the conditions in which thermal fluctuations and acoustic pressures have closely the same effect on the AFM cantilever (noise interference) is provided with both theoretical and experimental arguments. Consequently, beyond the noise interference range, commercial low stiffness AFM cantilevers are calibrated in two ways: using the thermal noise (in a wide temperature range) and acoustic pressures generated by a loudspeaker. We then demonstrate that acoustic noises can also be used for an efficient characterization and calibration of low stiffness AFM cantilevers. The accuracy of the acoustic characterization is evaluated by comparison with results from the thermal calibration.
当使用校准后的悬臂时,原子力显微镜(AFM)是测量微/纳米尺度力的强大工具。除了许多现有的校准技术外,热校准是对AFM悬臂进行动态表征的最简单、最快的方法之一。如果在校准过程中布朗运动(热噪声)是最重要的激励源,那么这种方法是有效的。否则,弹簧常数的值会被低估。本文考虑热涨落和声压这两个主要噪声源,研究了低刚度AFM悬臂中的噪声干扰范围。结果,通过理论和实验论证,给出了关于热涨落和声压对AFM悬臂具有几乎相同影响(噪声干扰)的条件的初步认识。因此,超出噪声干扰范围后,商用低刚度AFM悬臂通过两种方式进行校准:利用热噪声(在较宽温度范围内)和扬声器产生的声压。然后我们证明,声噪声也可用于低刚度AFM悬臂的有效表征和校准。通过与热校准结果进行比较,评估了声学表征的准确性。