Li H-F, Kar A K, Parker T, Wang G-C, Lu T-M
Center for Integrated Electronics, and Department of Physics, Applied Physics and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180-3590, USA.
Nanotechnology. 2008 Aug 20;19(33):335708. doi: 10.1088/0957-4484/19/33/335708. Epub 2008 Jul 8.
We report the creation of unusual biaxial textures in Cu nanorod films, through the control of the incident vapor flux during oblique angle deposition. High-density twin boundaries were formed using a periodic azimuthal swing rotation of the substrate while the incident angle of the Cu flux was fixed at 85° with respect to the surface normal. In contrast, depositions on stationary substrates resulted in nanorod films with a much lower density of twinned crystals. From transmission electron microscopy and x-ray pole figure analysis, the nanorod axis was shown to coincide approximately with the [Formula: see text] crystallographic directions. We also observed the branching of these nanostructures into 'nanotrees'. This branching was attributed to the creation of edge dislocations during the deposition and was particularly prevalent for the case of swing rotation. The mechanisms for the development of texture, twinning, and branching in these nanostructures are discussed.
我们报告了通过在倾斜角沉积过程中控制入射蒸汽通量，在铜纳米棒薄膜中创建异常双轴织构的方法。在铜通量的入射角相对于表面法线固定为85°时，通过对衬底进行周期性方位角摆动旋转形成了高密度孪晶界。相比之下，在固定衬底上的沉积导致纳米棒薄膜中孪晶晶体的密度要低得多。通过透射电子显微镜和X射线极图分析表明，纳米棒轴大致与[公式：见正文]晶体学方向一致。我们还观察到这些纳米结构分支成“纳米树”。这种分支归因于沉积过程中边缘位错的产生，并且在摆动旋转的情况下尤为普遍。讨论了这些纳米结构中织构、孪晶和分支发展的机制。
