Amotchkina Tatiana V, Trubetskov Michael K, Pervak Vladimir, Schlichting Sebastian, Ehlers Henrik, Ristau Detlev, Tikhonravov Alexander V
Research Computing Center, Moscow State University, Leninskie Gory, 119992, Moscow, Russia.
Appl Opt. 2011 Jul 10;50(20):3389-95. doi: 10.1364/AO.50.003389.
Two algorithms used for the on-line and off-line characterization of multilayer optical coatings are experimentally compared using test samples produced by two different deposition processes and different monitoring approaches. One of these algorithms, called the triangular algorithm, demonstrates its superiority in all considered situations. We performed experiments with multilayer samples formed by high-density thin films, which allowed us to neglect possible errors in the film refractive indices and concentrate only on errors in the thicknesses of the layers of the produced coatings.
使用由两种不同沉积工艺和不同监测方法制备的测试样品，对用于多层光学涂层在线和离线表征的两种算法进行了实验比较。其中一种算法称为三角算法，在所有考虑的情况下都显示出其优越性。我们对由高密度薄膜形成的多层样品进行了实验，这使我们能够忽略薄膜折射率中可能存在的误差，而仅关注所制备涂层各层厚度的误差。
