School of Mechanical Engineering, The University of Birmingham, Edgbaston, Birmingham B15 2TT, UK.
Ultramicroscopy. 2011 Jul;111(8):1214-23. doi: 10.1016/j.ultramic.2011.03.009. Epub 2011 Mar 21.
In this paper a new method of fabricating cylindrical resin microcantilevers using the Direct Digital Manufacturing (DDM) technique of Micro-stereolithography (MSL) is described. The method is rapid and commercially viable, allowing the fabrication of atomic force microscope (AFM) cantilevers which exhibit much larger spring constants than those currently commercial available. This allows for experimentation in a force regime orders of magnitude higher than currently possible using the AFM. This makes these cantilevers ideally suited for AFM-based depth sensing indentation. Due to their geometry, the assumptions used in the standard Euler-Bernoulli beam theory usually used to analyse AFM cantilevers may no longer be valid. Therefore approximate analytical solutions based on Timoshenko beam theory have been derived for the stiffness and resonant frequency of these cantilevers. Prototypes of the cantilevers have been fabricated and tested. Results show good agreement between experiment and theory.
本文描述了一种使用微立体光刻（MSL）的直接数字制造（DDM）技术制造圆柱形树脂微悬臂梁的新方法。该方法快速且具有商业可行性，允许制造原子力显微镜（AFM）悬臂梁，其弹性常数比目前商业上可用的悬臂梁大得多。这使得在比当前使用 AFM 更高的力范围内进行实验成为可能。这使得这些悬臂梁非常适合基于 AFM 的深度感应压痕。由于其几何形状，通常用于分析 AFM 悬臂梁的标准 Euler-Bernoulli 梁理论的假设可能不再有效。因此，已经为这些悬臂梁的刚度和共振频率推导出了基于 Timoshenko 梁理论的近似解析解。已经制造和测试了悬臂梁的原型。结果表明实验和理论之间具有良好的一致性。
