UNAM (National Autonomous University of Mexico), Faculty of Engineering, Electronics Department, Ciudad Universitaria, DF México, México.
IEEE Trans Ultrason Ferroelectr Freq Control. 2011 Jul;58(7):1460-7. doi: 10.1109/TUFFC.2011.1965.
Phase velocity of a surface acoustic wave (SAW) varies when the electric field associated with the wave interacts with a conductive material located above the propagation plane. In this paper, we propose a general method to approximate the scattering matrix when the conductive structure has a specific geometry. This structure has reflective properties of SAW. As an example, we considered a previously reported SAW-MEMS microaccelerometer which mainly consists of a slotted beam. By applying this method, we obtained the relationship between acceleration and the reflection and transmission coefficients. The dynamic of the slotted beam was studied using the finite element method (FEM). It was observed that relatively small variations in the size of the microstructure could cause significant changes in the reflection and transmission coefficients. We also show that the slotted beam acts as an acoustic wave bandpass filter, and its response is similar to that of reflective gratings, but with linear phase.
当与波相关的电场与位于传播平面上方的导电材料相互作用时，表面声波 (SAW) 的相速度会发生变化。在本文中，我们提出了一种当导电结构具有特定几何形状时近似散射矩阵的通用方法。该结构具有 SAW 的反射特性。例如，我们考虑了之前报道的一种主要由开槽梁组成的 SAW-MEMS 微加速度计。通过应用这种方法，我们获得了加速度与反射和透射系数之间的关系。使用有限元法 (FEM) 研究了开槽梁的动力学。观察到微结构尺寸的较小变化可能导致反射和透射系数的显著变化。我们还表明，开槽梁充当声波带通滤波器，其响应类似于反射光栅，但具有线性相位。
