Division of Pharmaceutical Chemistry, Faculty of Pharmacy, University of Helsinki, P.O. Box 56, FI-00014 Helsinki, Finland.
Lab Chip. 2011 Sep 7;11(17):3011-4. doi: 10.1039/c1lc20275h. Epub 2011 Jul 18.
This work presents a way of using silicon microfabrication to take advantage of the rim of a silicon wafer in a novel manner. Our circular multichip platform, which is fabricated using only standard microfabrication techniques, has 60 identical miniaturized micropillar array electrospray ionization (μPESI) chips at the periphery of a silicon wafer. The fabricated platform is fixed on a computer controlled rotating table, in front of a mass spectrometer (MS). After each MS measurement an unused μPESI chip is aligned towards the MS by the programmable rotating table. Our wafer-scale platform enabled measurement of 60 samples in 8 minutes. The samples can also be stored on the platform for later analysis.
本工作提出了一种利用硅微加工技术以新颖的方式利用硅片边缘的方法。我们的圆形多芯片平台仅使用标准微加工技术制造，在硅片的周边有 60 个相同的微型化微柱阵列电喷雾电离（μPESI）芯片。制造的平台固定在计算机控制的旋转台上，位于质谱仪（MS）的前面。每次 MS 测量后，可编程旋转台将一个未使用的 μPESI 芯片对准 MS。我们的晶圆级平台能够在 8 分钟内测量 60 个样品。这些样品也可以储存在平台上，以备后续分析。
