Hu Qin, O'Neill William
Institute for Manufacturing, Department of Engineering, University of Cambridge, Cambridge CB3 0FS, UK.
J Nanosci Nanotechnol. 2011 Jun;11(6):5394-401. doi: 10.1166/jnn.2011.3773.
Glassy carbon is an advanced non-graphitizing carbon material with many unique properties. This work explores the surface modification and machining characteristics of glassy carbon when subject to a Focused Ion Beam (FIB) over a range of incident angles. A FIB system delivering a 30 keV Ga+ ion beam was used to irradiate the surface of polished glassy carbon substrates. On irradiation at incident angles less 40 degrees, the surface is smooth and uniform. Nano particle deposits were observed on the irradiated floor and sidewalls after prolonged irradiation. With incident angles over 40 degrees, the irradiated area exhibits nano-scale patterns in the form of ripples, steps and columnar features. The evolution of these structures increases with the incident angle. The orientation of the nano features changes from parallel to perpendicular with respect to the direction of propagation of the ion beam. Although the simultaneous formation of nano features could be problematic for applications such as ion milling or polishing, they offer an effective means of developing nano-scale surface modification at the point of irradiation. Possible applications are discussed.
玻璃碳是一种具有许多独特性能的先进非石墨化碳材料。这项工作探索了玻璃碳在一系列入射角下受到聚焦离子束（FIB）作用时的表面改性和加工特性。使用一个能产生30 keV Ga+离子束的FIB系统来辐照抛光后的玻璃碳基底表面。在入射角小于40度进行辐照时，表面光滑且均匀。长时间辐照后，在辐照的底面和侧壁上观察到纳米颗粒沉积。当入射角超过40度时，辐照区域呈现出涟漪、台阶和柱状特征等纳米级图案。这些结构的演变随入射角增加。纳米特征的取向相对于离子束传播方向从平行变为垂直。尽管同时形成纳米特征对于离子铣削或抛光等应用可能存在问题，但它们为在辐照点开发纳米级表面改性提供了一种有效手段。文中讨论了可能的应用。
