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基于蒙特卡罗研究的兆电子伏特透射电子散射导致的厚样本图像模糊

Image blurring of thick specimens due to MeV transmission electron scattering: a Monte Carlo study.

作者信息

Wang Fang, Zhang Hai-Bo, Cao Meng, Nishi Ryuji, Takaoka Akio

机构信息

Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Department of Electronic Science and Technology, Xi'an Jiaotong University, Xi'an, People's Republic of China.

出版信息

J Electron Microsc (Tokyo). 2011;60(5):315-20. doi: 10.1093/jmicro/dfr054. Epub 2011 Jul 19.

DOI:10.1093/jmicro/dfr054
PMID:21771806
Abstract

Image blurring of MeV transmission electrons for gold nanoparticles on the top surface of micrometer-thick specimens has been investigated using the Monte Carlo simulation. Both the simulated line density profile and therefore image blurring were in good agreement with the experimental ones in the ultrahigh voltage electron microscope. Quantitative effects of specimen thickness and electron energy on image blurring were presented, in which the specimen thickness had a greater influence. Image blurring was demonstrated to be caused mainly by multiple elastic scattering, but it could be reduced to several nanometers for a 5 µm thick epoxy-resin specimen at the electron energy of 2 MeV.

摘要

利用蒙特卡罗模拟研究了微米厚样品顶表面金纳米颗粒的兆电子伏特透射电子的图像模糊情况。在超高压电子显微镜中,模拟的线密度分布以及由此产生的图像模糊与实验结果吻合良好。给出了样品厚度和电子能量对图像模糊的定量影响,其中样品厚度的影响更大。结果表明,图像模糊主要是由多次弹性散射引起的,但对于厚度为5微米的环氧树脂样品,在2兆电子伏特的电子能量下,图像模糊可减小到几纳米。

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Image blurring of thick specimens due to MeV transmission electron scattering: a Monte Carlo study.基于蒙特卡罗研究的兆电子伏特透射电子散射导致的厚样本图像模糊
J Electron Microsc (Tokyo). 2011;60(5):315-20. doi: 10.1093/jmicro/dfr054. Epub 2011 Jul 19.
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