利用激光开槽优化太阳能电池选择性发射极制造方法

Optimization of selective emitter fabrication method for solar cells using a laser grooving.

作者信息

Jung W W, Kim S C, Jung S W, Moon I Y, Kumar K, Lee Y W, Kim S Y, Ju M K, Han S K, Yi J

机构信息

School of Information and Communication Engineering, Sungkyunkwan University, 300 Cheoncheon-dong, Jangan-gu, Suwon 440-746, Korea.

出版信息

J Nanosci Nanotechnol. 2011 May;11(5):4373-7. doi: 10.1166/jnn.2011.3711.

DOI:10.1166/jnn.2011.3711

PMID:21780460

Abstract

In this paper, screen-printing laser grooved buried contact (LGBC) method was applied, which is compatible with the existing screen-printed solar cell equipment and facilities. Experiments were performed in order to optimize short circuit current (I(sc)), open circuit voltage (V(oc)) and fill factor of high efficiency solar cells. To enhance I(sc), V(oc) and efficiency, heavy doping was performed at low sheet resistance in the laser grooved region of the cell. In contrast, light doping was carried out at a high sheet resistance in the non-laser grooved region. To increase fill factor, porous silicon found on the wafer after dipping in an HF solution to remove SiN(x), was cleared. The fabricated screen-printing LGBC solar cell using a 125 mm x 125 mm single crystalline silicon wafer exhibited an efficiency of 17.2%. The results show that screen-printing LGBC method can be applied for high efficiency solar cells.

摘要

在本文中，应用了丝网印刷激光刻槽埋层接触（LGBC）方法，该方法与现有的丝网印刷太阳能电池设备和设施兼容。进行实验以优化高效太阳能电池的短路电流（I(sc)）、开路电压（V(oc)）和填充因子。为了提高I(sc)、V(oc)和效率，在电池的激光刻槽区域以低薄层电阻进行重掺杂。相反，在非激光刻槽区域以高薄层电阻进行轻掺杂。为了提高填充因子，去除了在浸入氢氟酸溶液以去除SiN(x)后在晶圆上发现的多孔硅。使用125mm×125mm单晶硅晶圆制造的丝网印刷LGBC太阳能电池的效率为17.2%。结果表明，丝网印刷LGBC方法可应用于高效太阳能电池。