School of Information and Communication Engineering, Sungkyunkwan University, 300 Cheoncheon-dong, Jangan-gu, Suwon, 440-746, South Korea.
Nanoscale Res Lett. 2012 Jul 23;7(1):410. doi: 10.1186/1556-276X-7-410.
The low level doping of a selective emitter by etch back is an easy and low cost process to obtain a better blue response from a solar cell. This work suggests that the contact resistance of the selective emitter can be controlled by wet etching with the commercial acid barrier paste that is commonly applied in screen printing. Wet etching conditions such as acid barrier curing time, etchant concentration, and etching time have been optimized for the process, which is controllable as well as fast. The acid barrier formed by screen printing was etched with HF and HNO3 (1:200) solution for 15 s, resulting in high sheet contact resistance of 90 Ω/sq. Doping concentrations of the electrode contact portion were 2 × 1021 cm-3 in the low sheet resistance (Rs) region and 7 × 1019 cm-3 in the high Rs region. Solar cells of 12.5 × 12.5 cm2 in dimensions with a wet etch back selective emitter Jsc of 37 mAcm-2, open circuit voltage (Voc) of 638.3 mV and efficiency of 18.13% were fabricated. The result showed an improvement of about 13 mV on Voc compared to those of the reference solar cell fabricated with the reactive-ion etching back selective emitter and with Jsc of 36.90 mAcm-2, Voc of 625.7 mV, and efficiency of 17.60%.
通过回蚀刻对选择性发射极进行低水平掺杂是一种简单且低成本的工艺,可以从太阳能电池中获得更好的蓝色响应。这项工作表明,通过使用商业的掩蔽浆料进行湿蚀刻可以控制选择性发射极的接触电阻,掩蔽浆料通常用于丝网印刷。已经对湿蚀刻条件(如掩蔽浆料固化时间、蚀刻剂浓度和蚀刻时间)进行了优化,该工艺可控且快速。通过 HF 和 HNO3(1:200)溶液对丝网印刷形成的掩蔽浆料进行 15 s 的腐蚀,得到了 90 Ω/sq 的高片接触电阻。在低片电阻(Rs)区域的电极接触部分的掺杂浓度为 2×1021 cm-3,在高 Rs 区域的掺杂浓度为 7×1019 cm-3。制造了尺寸为 12.5×12.5 cm2 的具有湿回蚀刻选择性发射极 Jsc 为 37 mAcm-2、开路电压(Voc)为 638.3 mV 和效率为 18.13%的太阳能电池。结果表明,与使用反应离子蚀刻回选择性发射极制造的参考太阳能电池相比,Voc 提高了约 13 mV,Jsc 为 36.90 mAcm-2,Voc 为 625.7 mV,效率为 17.60%。