Luong Bich Thi, Oh Jin-Woo, Choi Jongwan, Kim Nakjoong
Department of Chemistry and Research Institute for Natural Sciences, Hanyang University, 17 Haengdang-Dong, Seongdong-Gu, Seoul 133-791, Korea.
J Nanosci Nanotechnol. 2011 May;11(5):4546-50. doi: 10.1166/jnn.2011.3679.
In this work, we report on a simple method to fabricate a Mach-Zehnder type waveguide pattern using photopatternable sol-gel organic-inorganic hybrid materials. The refractive indices and propagation losses of the gel films were measured using the prism coupling method. The refractive indices of the resulting films were significantly influenced by the 3-trimethoxysilylpropylmethacrylate (TMSPM) concentration, and the average propagation loss was 0.32-0.52 dB/cm at the wavelength of 632.8 nm. The waveguides were fabricated using spin-coating and a photolithography technique. The Y-branch and straight pattern of the Mach-Zehnder waveguide were well-defined and had high transparency (> 97%) in the visible region. The average thickness of the gel films was 10 microm, and the average width of the Mach-Zehnder pattern was 10 microm. The structural and optical properties of the fabricated patterns were analyzed using scanning electron microscopy (SEM), atomic force microscopy (AFM), near-infrared (IR) spectroscopy, and ultraviolet (UV)-visible spectroscopy.
在这项工作中，我们报道了一种使用可光图案化的溶胶-凝胶有机-无机杂化材料制造马赫-曾德尔型波导图案的简单方法。使用棱镜耦合法测量了凝胶薄膜的折射率和传播损耗。所得薄膜的折射率受甲基丙烯酸3-三甲氧基硅丙酯（TMSPM）浓度的显著影响，在632.8 nm波长下平均传播损耗为0.32 - 0.52 dB/cm。使用旋涂和光刻技术制造了波导。马赫-曾德尔波导的Y分支和直线图案清晰明确，在可见光区域具有高透明度（> 97%）。凝胶薄膜的平均厚度为10微米，马赫-曾德尔图案的平均宽度为10微米。使用扫描电子显微镜（SEM）、原子力显微镜（AFM）、近红外（IR）光谱和紫外（UV）-可见光谱对制造的图案的结构和光学性质进行了分析。
