Department of Mechanical Engineering, University of Michigan, Ann Arbor, Michigan 48109, USA.
ACS Nano. 2011 Sep 27;5(9):7310-7. doi: 10.1021/nn202156q. Epub 2011 Aug 3.
Deterministic organization of nanostructures into microscale geometries is essential for the development of materials with novel mechanical, optical, and surface properties. We demonstrate scalable fabrication of 3D corrugated carbon nanotube (CNT) microstructures, via an iterative sequence of vertically aligned CNT growth and capillary self-assembly. Vertical microbellows and tilted microcantilevers are created over large areas, and these structures can have thin walls with aspect ratios exceeding 100:1. We show these structures can be used as out-of-plane microsprings with compliance determined by the wall thickness and number of folds.
将纳米结构确定性地组织成微尺度几何形状对于开发具有新颖机械、光学和表面性能的材料至关重要。我们通过垂直定向碳纳米管（CNT）生长和毛细自组装的迭代序列，展示了 3D 波纹 CNT 微结构的可扩展制造。在大面积上制造出垂直微波纹管和倾斜微悬臂梁，这些结构具有超过 100:1 的壁厚比的薄壁。我们表明，这些结构可用作面外微弹簧，其柔顺性由壁厚和折叠数量决定。
