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在裸露的和Ga终止的Si(112)上Ge岛生长的温度依赖型低能电子显微镜研究

Temperature dependent low energy electron microscopy study of Ge island growth on bare and Ga terminated Si(112).

作者信息

Speckmann M, Schmidt Th, Flege J I, Sadowski J T, Sutter P, Falta J

机构信息

Institute of Solid State Physics, University of Bremen, Otto-Hahn-Allee 1, 28359 Bremen, Germany.

出版信息

J Phys Condens Matter. 2009 Aug 5;21(31):314020. doi: 10.1088/0953-8984/21/31/314020. Epub 2009 Jul 7.

Abstract

The pre-adsorption of Ga on Si(112) leads to a drastic change of the morphology of subsequently grown Ge islands. In contrast to the case for Ge growth on bare Si(112), even nanowire growth can be achieved on Ga terminated Si(112). Employing low energy electron microscopy and low energy electron diffraction, the initial phase of Ge nucleation and Ge island growth was systematically analysed for growth temperatures between 420 and 610 °C, both on clean and on Ga terminated Si(112). In both cases the island density exhibits an Arrhenius-like behaviour, from which diffusion barrier heights of about 1.3 and 1.0 eV can be estimated for growth with and without Ga pre-adsorption, respectively. The Ge island shape on the bare Si(112) surface is found to be nearly circular over the whole temperature range, whereas the shapes of the Ge islands on the Ga terminated Si(112) become highly anisotropic for higher temperatures. Ge nanowires with sizes of up to 2 µm along the [Formula: see text] direction are observed.

摘要

镓在Si(112)上的预吸附会导致后续生长的锗岛形态发生剧烈变化。与在裸Si(112)上生长锗的情况不同,在镓终止的Si(112)上甚至可以实现纳米线生长。利用低能电子显微镜和低能电子衍射,系统地分析了在420至610 °C的生长温度下,在清洁的和镓终止的Si(112)上锗成核和锗岛生长的初始阶段。在这两种情况下,岛密度都呈现出类似阿仑尼乌斯的行为,由此分别估计出在有和没有镓预吸附的情况下生长时,扩散势垒高度约为1.3和1.0电子伏特。发现在整个温度范围内,裸Si(112)表面上的锗岛形状几乎是圆形的,而在较高温度下,镓终止的Si(112)上的锗岛形状变得高度各向异性。观察到沿[公式:见正文]方向尺寸达2微米的锗纳米线。

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