Kojima Yasuhiko, Kato Takahisa
Engineering Section, Elionix Inc., 3-7-6 Motoyokoyama, Hachiouji, Tokyo 192-0063, Japan.
Nanotechnology. 2008 Jun 25;19(25):255605. doi: 10.1088/0957-4484/19/25/255605. Epub 2008 May 15.
We carried out investigations on electron-beam-induced nanoparticle formation in thin (5-30 nm) Au films on smooth SiO(2)/Si substrates. When the Au films were irradiated with an electron beam, the Au films broke up into nanoparticles through the dewetting process. The dominant wavelengths of the surface (corresponding to the pitch between nanoparticles) were closely related with the thickness of the Au. We then developed a new technique for the formation of periodically arranged Au nanoparticles using a holed substrate. The nanoholes induced heterogeneous nucleation and helped to form ordered nanoparticles between the holes. Two-dimensionally, periodically arranged Au nanoparticles with a pitch of 100 nm were obtained.
我们对光滑SiO(2)/Si衬底上的薄（5 - 30纳米）金膜中电子束诱导的纳米颗粒形成进行了研究。当用电子束照射金膜时，金膜通过去湿过程分解成纳米颗粒。表面的主导波长（对应于纳米颗粒之间的间距）与金膜的厚度密切相关。然后，我们开发了一种使用带孔衬底形成周期性排列金纳米颗粒的新技术。纳米孔诱导异质成核，并有助于在孔之间形成有序的纳米颗粒。二维上，获得了间距为100纳米的周期性排列的金纳米颗粒。
