Department of Materials for Electronics, Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano®, Ilmenau University of Technology, POB 10 05 65, 98684 Ilmenau, Germany.
Beilstein J Nanotechnol. 2011;2:318-26. doi: 10.3762/bjnano.2.37. Epub 2011 Jun 22.
The fabrication of precise 2D Au nanoparticle arrays over a large area is presented. The technique was based on pre-patterning of the substrate before the deposition of a thin Au film, and the creation of periodic particle arrays by subsequent dewetting induced by annealing. Two types of pre-patterned substrates were used: The first comprised an array of pyramidal pits and the second an array of circular holes. For the dewetting of Au films on the pyramidal pit substrate, the structural curvature-driven diffusion cooperates with capillarity-driven diffusion, resulting in the formation of precise 2D particle arrays for films within a structure dependent thickness-window. For the dewetting of Au films on the circular hole substrate, the periodic discontinuities in the films, induced by the deposition, can limit the diffusion paths and lead to the formation of one particle per individual separated region (holes or mesas between holes), and thus, result in the evolution of precise 2D particle arrays. The influence of the pre-patterned structures and the film thickness is analyzed and discussed. For both types of pre-patterned substrate, the Au film thickness had to be adjusted in a certain thickness-window in order to achieve the precise 2D particle arrays.
提出了一种在大面积上制备精确二维金纳米粒子阵列的方法。该技术基于在沉积薄金膜之前对基底进行预图案化，以及通过随后的退火诱导的去湿来形成周期性的粒子阵列。使用了两种类型的预图案化基底：第一种是由金字塔形凹坑阵列组成，第二种是由圆形孔阵列组成。对于在金字塔形凹坑基底上的金膜的去湿，结构曲率驱动的扩散与毛细力驱动的扩散协同作用，导致在依赖于结构的厚度窗口内形成精确的二维粒子阵列。对于在圆形孔基底上的金膜的去湿，沉积引起的膜中的周期性不连续性可以限制扩散路径，并导致在每个单独的分离区域（孔或孔之间的台面）中形成一个粒子，从而导致精确的二维粒子阵列的形成。分析和讨论了预图案化结构和膜厚的影响。对于这两种类型的预图案化基底，金膜的厚度必须在一定的厚度窗口内进行调整，以实现精确的二维粒子阵列。
