Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, Minnesota 55455, United States.
Nano Lett. 2011 Sep 14;11(9):3526-30. doi: 10.1021/nl2005737. Epub 2011 Aug 11.
We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.
我们展示了使用模板剥离技术在光学厚金属膜中精确集成平滑的凸起、凹槽和孔。图案化的硅片被用作高质量、可重复使用的模板。金属特征的高度或深度控制在 2nm 以内，从而具有连续可调的光学性能和尖锐、强烈的等离子体共振。此外，我们还展示了一种原位的拾取和放置模板剥离方法，实现了对纳米器件的多功能三维微操作、成像和表征。
