Monolithic integration of continuously tunable plasmonic nanostructures.

We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.