Puegner Tino, Knobbe Jens, Lakner Hubert
Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Strasse 2, 01109 Dresden, Germany.
Appl Opt. 2011 Aug 20;50(24):4894-902. doi: 10.1364/AO.50.004894.
Modern miniaturized scanning grating spectrometers (SGSs) are often based on microelectromechanical system devices. In contrast to classical spectrometers, such systems exhibit additional design constraints, like a symmetrical motion of the grating with a limited deflection. A detailed mathematical analysis of typical SGS configurations based on the grating equation considering these constraints is presented. Equations that relate the basic angles on a scanning grating to the grating properties and the attainable wavelength range of a spectrometer are derived, and the solution set is examined. Furthermore, the analytical description can be used to optimize SGSs with symmetrically moving gratings. The attainable spectral range for a given deflection amplitude of the grating can be calculated. Alternatively, the required grating properties can be determined for a given spectral range.
现代小型化扫描光栅光谱仪（SGS）通常基于微机电系统器件。与传统光谱仪相比，此类系统存在额外的设计限制，例如光栅的对称运动且偏转有限。本文基于光栅方程对典型SGS配置进行了详细的数学分析，同时考虑了这些限制条件。推导了将扫描光栅上的基本角度与光栅特性以及光谱仪可达到的波长范围相关联的方程，并对解集进行了研究。此外，该解析描述可用于优化具有对称运动光栅的SGS。可以计算出给定光栅偏转幅度下可达到的光谱范围。或者，也可以针对给定的光谱范围确定所需的光栅特性。
