Pügner Tino, Knobbe Jens, Grüger Heinrich
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany
Fraunhofer Institute for Photonic Microsystems, Dresden, Germany.
Appl Spectrosc. 2016 May;70(5):734-45. doi: 10.1177/0003702816638277.
Near-infrared (NIR) spectroscopy is a well-established technique for the chemical analysis of organic and inorganic matter. Accordingly, spectroscopic instrumentation of different complexity has been developed and is currently commercially available. However, there are an increasing number of new mobile applications that have come into focus and that cannot be addressed by the existing technology due to size and cost. Therefore, a new miniaturized scanning grating spectrometer for NIR spectroscopy has been developed at Fraunhofer IPMS. It is based on micro-electro-mechanical systems (MEMS) technology, and has been designed to meet the requirements for mobile application, regarding spectral range, resolution, overall size, robustness, and cost. The MEMS spectrometer covers a spectral range from 950 nm to 1900 nm at a resolution of 10 nm. The instrument is extremely small and has a volume of only 2.1 cm(3) Therefore, it is well suited for integration, even into a mobile phone. A first sample of the new spectrometer has been manufactured and put into operation. The results of a series of test measurements are in good agreement with the requirements and specifications.
近红外（NIR）光谱法是一种成熟的用于有机和无机物质化学分析的技术。相应地，已经开发出了不同复杂度的光谱仪器，并且目前在市场上可以买到。然而，越来越多新的移动应用受到关注，而现有技术由于尺寸和成本问题无法满足这些需求。因此，弗劳恩霍夫IPMS研发了一种用于近红外光谱的新型微型扫描光栅光谱仪。它基于微机电系统（MEMS）技术设计，旨在满足移动应用在光谱范围、分辨率、整体尺寸、耐用性和成本方面的要求。该MEMS光谱仪的光谱范围为950纳米至1900纳米，分辨率为10纳米。该仪器极其小巧，体积仅为2.1立方厘米，因此非常适合集成，甚至可以集成到手机中。新型光谱仪的首个样品已制造完成并投入使用。一系列测试测量的结果与要求和规格吻合良好。
