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锗硅半导体纳米线异质结构的生长、缺陷形成和形貌控制。

Growth, defect formation, and morphology control of germanium-silicon semiconductor nanowire heterostructures.

机构信息

Center for Integrated Nanotechnologies, Los Alamos National Laboratory, Los Alamos, New Mexico, United States.

出版信息

Nano Lett. 2011 Oct 12;11(10):4200-6. doi: 10.1021/nl202126q. Epub 2011 Aug 31.

DOI:10.1021/nl202126q
PMID:21877708
Abstract

By the virtue of the nature of the vapor-liquid-solid (VLS) growth process in semiconductor nanowires (NWs) and their small size, the nucleation, propagation, and termination of stacking defects in NWs are dramatically different from that in thin films. We demonstrate germanium-silicon axial NW heterostructure growth by the VLS method with 100% composition modulation and use these structures as a platform to understand how defects in stacking sequence force the ledge nucleation site to be moved along or pinned at a single point on the triple-phase circumference, which in turn determines the NW morphology. Combining structural analysis and atomistic simulation of the nucleation and propagation of stacking defects, we explain these observations based on preferred nucleation sites during NW growth. The stacking defects are found to provide a fingerprint of the layer-by-layer growth process and reveal how the 19.5° kinking in semiconductor NWs observed at high Si growth rates results from a stacking-induced twin boundary formation at the NW edge. This study provides basic foundations for an atomic level understanding of crystalline and defective ledge nucleation and propagation during [111] oriented NW growth and improves understanding for control of fault nucleation and kinking in NWs.

摘要

由于半导体纳米线(NWs)中蒸气-液体-固体(VLS)生长过程的性质及其小尺寸,NWs 中堆垛缺陷的成核、扩展和终止与薄膜中的情况有很大不同。我们通过 VLS 方法展示了具有 100%成分调制的锗-硅轴向 NW 异质结构生长,并利用这些结构作为平台来了解堆叠序列中的缺陷如何迫使平台成核位置沿三相边界的单个点移动或被固定,这反过来又决定了 NW 的形态。通过对堆垛缺陷的成核和扩展的结构分析和原子模拟,我们根据 NW 生长过程中的优先成核位置解释了这些观察结果。这些堆垛缺陷提供了层状生长过程的特征,并揭示了在高 Si 生长速率下观察到的半导体 NW 中 19.5°的扭曲如何是由 NW 边缘处的堆叠诱导孪晶界形成引起的。这项研究为理解[111]取向 NW 生长过程中晶态和有缺陷的平台成核和扩展提供了原子级基础,并提高了对 NW 中缺陷成核和扭曲控制的认识。

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