Micro & Nanotechnology Lab, University of Illinois, Urbana-Champaign, Illinois 61801, United States.
ACS Nano. 2011 Oct 25;5(10):7936-44. doi: 10.1021/nn202239y. Epub 2011 Sep 13.
We use infrared thermal imaging and electrothermal simulations to find that localized Joule heating in graphene field-effect transistors on SiO(2) is primarily governed by device electrostatics. Hot spots become more localized (i.e., sharper) as the underlying oxide thickness is reduced, such that the average and peak device temperatures scale differently, with significant long-term reliability implications. The average temperature is proportional to oxide thickness, but the peak temperature is minimized at an oxide thickness of ∼90 nm due to competing electrostatic and thermal effects. We also find that careful comparison of high-field transport models with thermal imaging can be used to shed light on velocity saturation effects. The results shed light on optimizing heat dissipation and reliability of graphene devices and interconnects.
我们利用红外热成像和电热模拟发现,SiO2 上的石墨烯场效应晶体管中的局域焦耳加热主要受器件静电学控制。随着氧化层厚度的减小,热点变得更加局域化(即更加尖锐),从而导致平均和峰值器件温度以不同的方式缩放,这对长期可靠性有重要影响。平均温度与氧化层厚度成正比,但由于静电和热效应的竞争,峰值温度在氧化层厚度约为 90nm 时最小。我们还发现,仔细比较高场输运模型与热成像可以揭示速度饱和效应。这些结果为优化石墨烯器件和互连的散热和可靠性提供了思路。