Zhang P, Wang H Y, Li Y G, Mao S F, Ding Z J
Hefei National Laboratory for Physical Sciences at Microscale, Department of Physics, University of Science and Technology of China, Hefei, Anhui, People's Republic of China.
Scanning. 2012 May-Jun;34(3):145-50. doi: 10.1002/sca.20288. Epub 2011 Sep 15.
Monte Carlo simulation methods for the study of electron beam interaction with solids have been mostly concerned with specimens of simple geometry. In this article, we propose a simulation algorithm for treating arbitrary complex structures in a real sample. The method is based on a finite element triangular mesh modeling of sample geometry and a space subdivision for accelerating simulation. Simulation of secondary electron image in scanning electron microscopy has been performed for gold particles on a carbon substrate. Comparison of the simulation result with an experiment image confirms that this method is effective to model complex morphology of a real sample.
用于研究电子束与固体相互作用的蒙特卡罗模拟方法主要关注简单几何形状的样本。在本文中，我们提出了一种用于处理实际样品中任意复杂结构的模拟算法。该方法基于样品几何形状的有限元三角网格建模和用于加速模拟的空间细分。已对碳基底上的金颗粒进行了扫描电子显微镜二次电子图像的模拟。模拟结果与实验图像的比较证实了该方法对于模拟实际样品的复杂形态是有效的。
