Ding Z J, Li Chao, Da Bo, Liu Jiangwei
Department of Physics and Hefei National Laboratory for Physical Sciences at Microscale, University of Science and Technology of China, Hefei, People's Republic of China.
Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science, Tsukuba, Japan.
Sci Technol Adv Mater. 2021 Nov 11;22(1):932-971. doi: 10.1080/14686996.2021.1976597. eCollection 2021.
Charging effect frequently occurs when characterizing nonconductive materials using electrons as probes and/or signals and can impede the acquisition of useful information about the material under investigation. It is not adequate to investigate it merely by experiments, but theoretical investigations, for which the Monte Carlo method is a suitable tool, are also necessary. In this paper we review Monte Carlo simulations and selected experiments, intending to provide general insight into the charging effects induced by electron beam irradiation. We will introduce categories of the charging effect, the theoretical framework that is adopted in Monte Carlo modeling of the charging effect and present some typical simulation results. At last, with the knowledge on charging effect imparted by the above contents, we will discuss the measures that can be used for minimizing it.
当使用电子作为探针和/或信号来表征非导电材料时，充电效应经常会出现，并且会阻碍获取有关被研究材料的有用信息。仅通过实验来研究它是不够的，还需要进行理论研究，而蒙特卡罗方法是进行理论研究的合适工具。在本文中，我们回顾了蒙特卡罗模拟和一些选定的实验，旨在对电子束辐照引起的充电效应提供总体认识。我们将介绍充电效应的类别、用于充电效应蒙特卡罗建模的理论框架，并展示一些典型的模拟结果。最后，基于上述内容所提供的关于充电效应的知识，我们将讨论可用于将其最小化的措施。
