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光纤耦合无周期性非线性位移干涉测量法。

Fiber-coupled displacement interferometry without periodic nonlinearity.

机构信息

PME: Mechatronic System Design, Delft University of Technology, Delft, The Netherlands.

出版信息

Opt Lett. 2011 Sep 15;36(18):3584-6. doi: 10.1364/OL.36.003584.

Abstract

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinearity in both free-space and fiber-delivered variants.

摘要

位移干涉测量法被广泛应用于许多领域,以实现纳米级和亚纳米级位移的精确测量。在许多现代系统中,光纤传输可以限制光学对准并将热源从系统中移除,但光纤传输会加剧常见的干涉测量问题,如周期性非线性和光纤诱导漂移。在这封信件中,我们描述了一种新颖的、通用的 Joo 型干涉仪,它在经过任何光纤传输后都具有光学参考,从而消除了光纤诱导的漂移。这种干涉仪在自由空间和光纤传输两种变体中都没有检测到可察觉的周期性非线性。

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