Joo Ki-Nam, Ellis Jonathan D, Buice Eric S, Spronck Jo W, Schmidt Robert H Munnig
Mechatronic System Design, Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, The Netherlands.
Opt Express. 2010 Jan 18;18(2):1159-65. doi: 10.1364/OE.18.001159.
A high resolution heterodyne laser interferometer without periodic nonlinearity for linear displacement measurements is described. It uses two spatially separated beams with an offset frequency and an interferometer configuration which has no mixed states to prevent polarization mixing. In this research, a simple interferometer configuration for both retroreflector and plane mirror targets which are both applicable to industrial applications was developed. Experimental results show there is no detectable periodic nonlinearity for both of the retro-reflector interferometer and plane mirror interferometer to the noise level of 20 pm. Additionally, the optical configuration has the benefit of doubling the measurement resolution when compared to its respective traditional counterparts. Because of non-symmetry in the plane mirror interferometer, a differential plane mirror interferometer to reduce the thermal error is also discussed.
本文描述了一种用于线性位移测量的无周期性非线性的高分辨率外差激光干涉仪。它使用两个空间分离的具有偏移频率的光束以及一种无混合态以防止偏振混合的干涉仪配置。在本研究中，开发了一种适用于工业应用的、针对后向反射镜和平面镜目标的简单干涉仪配置。实验结果表明，后向反射镜干涉仪和平平面镜干涉仪在20皮米的噪声水平下均未检测到周期性非线性。此外，与各自的传统配置相比，该光学配置具有将测量分辨率提高一倍的优点。由于平面镜干涉仪存在不对称性，还讨论了一种用于减少热误差的差动平面镜干涉仪。
