Tsarev Andrei V
AV Rzhanov Institute of Semiconductor Physics SB RAS, Prospect Lavrenteva 13, Novosibirsk 630090, Russia. tsarev@.isp.nsc.ru
Opt Express. 2011 Jul 18;19(15):13732-7. doi: 10.1364/OE.19.013732.
Multiple optical elements utilize crossing of channel optical waveguides. This paper introduces efficient silicon wire waveguide crossing by means of vertical coupling of tapered Si wire with upper polymer wide strip waveguide through a silica buffer. Numerical simulations by 3D FDTD prove that optimal structure of 70 µm length can provide 98% efficiency for through pass and 99.9% efficiency for cross pass, as well as negligible back reflection (-50 dB) and cross talk (-70 dB). Proposed waveguide crossing on thin silicon-on-insulator CMOS compatible structures could find multiple applications in Photonics.
多个光学元件利用通道光波导的交叉。本文介绍了一种高效的硅线波导交叉方法，即通过锥形硅线与上层聚合物宽带波导通过二氧化硅缓冲层进行垂直耦合。三维有限时域差分法（3D FDTD）的数值模拟证明，长度为70μm的优化结构可实现直通98%的效率、交叉通99.9%的效率，以及可忽略不计的背反射（-50 dB）和串扰（-70 dB）。所提出的基于绝缘体上硅（SOI）薄CMOS兼容结构的波导交叉在光子学中可找到多种应用。
