Fang Qing, Liow Tsung-Yang, Song Jun Feng, Tan Chee Wei, Yu Ming Bin, Lo Guo Qiang, Kwong Dim-Lee
Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore Science Park II, Singapore 117685.
Opt Express. 2010 Apr 12;18(8):7763-9. doi: 10.1364/OE.18.007763.
In this paper, an efficient and novel optical fiber-to-waveguide mode size converter for Si Photonics devices with sub-micron waveguides is developed on the SOI platform. This optical converter is composed of a suspended SiO(2) waveguide and overlapped Si nano-tapers located in the center of suspended SiO(2) waveguide. Laterally connected SiO(2) beams provide structural support for the suspended SiO(2) waveguide. The optical input signal from the optical fiber is launched into the suspended SiO(2) waveguide, and then coupled into the Si nano-taper. The measured coupling loss using a lensed fiber with 5 microm spot diameter is 1.7 ~2.0 dB/facet for TE mode and 2.0 ~2.4 dB/facet for TM mode in the wavelength range of 1520 ~1600 nm. When a cleaved fiber with 9.2microm spot diameter is used, the coupling losses for both TE and TM modes are less than 4.0 dB/facet at 1550 nm. For the case of lensed fiber, the alignment tolerances for both TE and TM modes are about +/- 1.7 microm for 1 dB excess loss in both X and Y axes. The alignment tolerances for both modes of TE and TM are relaxed, exceeding +/- 2.5 microm for 1 dB excess loss in both X and Y axes when a cleaved fiber is used.
本文在绝缘体上硅(SOI)平台上开发了一种用于具有亚微米波导的硅光子器件的高效新型光纤到波导模式尺寸转换器。这种光转换器由一个悬浮的SiO₂波导和位于悬浮SiO₂波导中心的重叠硅纳米锥组成。横向连接的SiO₂梁为悬浮的SiO₂波导提供结构支撑。来自光纤的光输入信号被注入到悬浮的SiO₂波导中,然后耦合到硅纳米锥中。在15201600nm波长范围内,使用光斑直径为5微米的透镜光纤测量的TE模式耦合损耗为1.72.0dB/面,TM模式耦合损耗为2.0~2.4dB/面。当使用光斑直径为9.2微米的切割光纤时,在1550nm处TE和TM模式的耦合损耗均小于4.0dB/面。对于透镜光纤的情况,在X和Y轴上1dB额外损耗时,TE和TM模式的对准公差约为±1.7微米。当使用切割光纤时,TE和TM模式在X和Y轴上1dB额外损耗时的对准公差放宽,超过±2.5微米。