Cheng James, You Sifang, Rahman Samia, Lo Yu-Hwa
Department of Electrical and Computer Engineering, University of California, San Diego, 9500 Gilman Drive M/C 0409, La Jolla, CA 92093, USA.
Opt Express. 2011 Aug 1;19(16):15149-54. doi: 10.1364/OE.19.015149.
InGaAs single photon avalanche detectors have previously been fabricated with a negative-feedback mechanism, which allows for free-running Geiger-mode operation and improves the signal noise. To reduce the dark count and improve the detection efficiency, zinc diffusion is necessary to define the p-i-n junction and separate the high-field region from any mesa surface. Here, we demonstrate the benefits of a simple Zn-diffused geometry, yielding 1550 nm single-photon detection efficiencies of 20% with a dark count rate of 8 kHz at 140 K for a 22 μm diameter device.
此前已制造出具有负反馈机制的铟镓砷单光子雪崩探测器，该机制允许自由运行的盖革模式操作并改善信号噪声。为了降低暗计数并提高探测效率，需要进行锌扩散来定义p-i-n结并将高场区与任何台面表面隔开。在此，我们展示了一种简单的锌扩散几何结构的优势，对于直径为22μm的器件，在140K温度下，其1550nm单光子探测效率为20%，暗计数率为8kHz。
