School for Engineering of Matter, Transport, and Energy, Arizona State University, Tempe, Arizona 85287-6106, USA.
Small. 2011 Dec 16;7(24):3409-27. doi: 10.1002/smll.201100486. Epub 2011 Oct 10.
Atomic force microscopy (AFM) has been an effective material removing tool for fabricating various nanostructures because of its sub-nanometer precision and simplicity in operation. AFM material removing techniques have evolved from a solely mechanical process to one in which the tip can be loaded by additional energy sources, such as thermal, electric, or chemical, to enhance its fabrication abilities. In this paper, these material removing techniques are reviewed with an emphasis on their capabilities and recent progress. The recent hardware and software developments are first presented to provide a general view on the current status of the technology to be assessed. Following an overview of the feasibility and effectiveness of using mechanical scratching for removing various types of soft and hard materials, the processes of a wide range of approaches using multiple tip sources are then assessed with a focus on their principles, versatilities, and potentials for future applications.
原子力显微镜（AFM）由于其亚纳米级的精度和操作简单，已经成为一种有效的材料去除工具，可用于制造各种纳米结构。AFM 材料去除技术已经从单纯的机械过程发展到可以通过附加能源（如热、电或化学）来加载针尖，以增强其制造能力。本文综述了这些材料去除技术，重点介绍了它们的功能和最新进展。首先介绍了最近的硬件和软件发展，以提供对技术现状的总体评估。在概述了机械划伤去除各种软硬材料的可行性和有效性之后，然后评估了使用多种针尖源的多种方法的过程，重点是它们的原理、多功能性和未来应用的潜力。
