School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA.
Biomed Microdevices. 2012 Feb;14(1):207-15. doi: 10.1007/s10544-011-9598-3.
This paper presents an ultra-thin and flexible polymer-based capacitive pressure sensor for intraocular pressure (IOP) monitoring in a mouse eye. Due to the size limitation of the anterior chamber in the mouse eye, a volume of approximately 700 × 700 × 150 μm(3) on a small substrate is available for the MEMS capacitive pressure sensor. Moreover, the sensor would ideally be easily injectable into place. Further complicating the sensing is the need to operate the device on the curved surface of the anterior chamber with minimum damage to the eye tissue. Therefore, a thin and flexible substrate is required. We fabricate sensors by exploiting Parylene as a biocompatible structural material in a suitable form factor and 25 μm thick liquid crystal polymer (LCP) as a soft and flexible host substrate. Using our approach, the flexibility and small form factor necessary for a mouse eye implant is achieved, along with the sensitivity required to monitor IOP fluctuations. This device will allow better study of glaucoma through close monitoring in mice after integration with other components.
本文提出了一种用于监测小鼠眼内压 (IOP) 的超薄柔性聚合物电容式压力传感器。由于小鼠眼前房的尺寸限制，在小基底上大约有 700×700×150 μm³ 的可用空间用于 MEMS 电容式压力传感器。此外，传感器理想情况下应该易于注射到位。进一步使传感复杂化的是需要在最小化对眼组织损伤的情况下在前房曲面上操作设备。因此，需要使用薄而灵活的基底。我们通过利用对苯二甲酸二甲酯 (Parylene) 作为合适的外形因素的生物相容性结构材料和 25 μm 厚的液晶聚合物 (LCP) 作为柔软灵活的主体基底来制造传感器。通过我们的方法，实现了用于小鼠眼植入物的柔性和小外形因素，以及监测 IOP 波动所需的灵敏度。该设备将通过与其他组件集成后在小鼠中进行密切监测，从而更好地研究青光眼。
