Department of Biomicrosystem Technology, Korea University, Seoul, Korea.
Nanotechnology. 2011 Nov 11;22(45):455301. doi: 10.1088/0957-4484/22/45/455301. Epub 2011 Oct 13.
We present the design, fabrication, and characterization results of single-wall carbon nanotube (SWCNT) film strain gauges for potential applications as highly sensitive strain, weight, or pressure sensors on the macro-scale. A batch microfabrication process was developed for practical device construction and packaging using spray-coated SWCNTs and a conventional semiconductor process. The prototype was characterized using a commercial metal foil gauge with tensile and compressive testing on a binocular load cell. Our test results demonstrated that the proposed SWCNT film gauges have a linear relationship between resistance changes and externally applied strain. The gauge factor ranged from 7.0 to 16.4 for four different micro-grid configurations, indicating that the maximum strain sensitivity of the prototype was approximately eight times greater than that of commercial gauges.
我们展示了单壁碳纳米管（SWCNT）薄膜应变计的设计、制造和特性研究结果，这些应变计有望作为宏观尺度上高度灵敏的应变、重量或压力传感器得到应用。开发了一种批量微制造工艺，用于使用喷涂的 SWCNT 和常规半导体工艺进行实际设备构建和封装。使用双目测力传感器进行拉伸和压缩测试，通过商用金属箔应变计对原型进行了特性评估。我们的测试结果表明，所提出的 SWCNT 薄膜应变计在电阻变化与外部施加应变之间具有线性关系。对于四种不同的微网格配置，应变系数范围为 7.0 至 16.4，表明原型的最大应变灵敏度大约比商用应变计高 8 倍。
