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用于沟道切割硅晶体的偏振相关X射线六束针孔形貌图。

Polarization-dependent X-ray six-beam pinhole topographs for a channel-cut silicon crystal.

作者信息

Okitsu Kouhei, Yoda Yoshitaka, Imai Yasuhiko, Ueji Yoshinori

机构信息

Nano-Engineering Research Center, Institute of Engineering Innovation, Graduate School of Engineering, The University of Tokyo, 2-11-16 Yayoi, Tokyo 113-8656, Japan.

出版信息

Acta Crystallogr A. 2011 Nov;67(Pt 6):550-6. doi: 10.1107/S0108767311037238. Epub 2011 Oct 18.

Abstract

It was pointed out in a previous paper [Okitsu et al. (2006), Acta Cryst. A62, 237-244] that an n-beam Takagi-Taupin (T-T) equation can be solved for a crystal of arbitrary shape. The procedure to integrate the n-beam T-T equation is to let all the Fourier coefficients of the electric susceptibility be zero at positions inside the Borrmann pyramid but outside the crystal. The efficiency of this simple procedure is verified in the present paper by showing qualitative and quantitative agreements between experimentally obtained and computer-simulated X-ray six-beam pinhole topographs for a channel-cut silicon crystal.

摘要

在之前的一篇论文中[冲津等(2006年),《晶体学报》A62卷,237 - 244页]指出,对于任意形状的晶体,n束高木 - 田品(T - T)方程都可以求解。对n束T - T方程进行积分的过程是,在博尔曼棱锥内部但在晶体外部的位置,让电极化率的所有傅里叶系数都为零。本文通过展示实验获得的和计算机模拟的沟道切割硅晶体的X射线六束针孔形貌图之间的定性和定量一致性,验证了这个简单过程的有效性。

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