Warsaw University of Technology, Institute of Micromechanics and Photonics, Warsaw, Poland.
Opt Lett. 2011 Nov 15;36(22):4419-21. doi: 10.1364/OL.36.004419.
In this Letter, we introduce an algorithm that overcomes limitations in shape measurement by holographic microscopic methods in cases of micro-optical elements with high NA, such as microlenses. The presented algorithm provides a simple method for shape reconstruction from interferometrically measured phase. The algorithm is based on the analysis of local ray transition through the measured object. We develop algorithms for holographic configurations working in transmission and reflection. The accuracy of the developed algorithms is proved by experiments and extensive simulations. We present an experiment in a holographic Mach-Zehnder configuration where we have measured and successfully reconstructed the height distribution of spherical and cylindrical microlenses with NA up to 0.3.
在这封信件中，我们介绍了一种算法，该算法克服了高数值孔径的微光学元件（如微透镜）的全息显微方法在形状测量方面的局限性。所提出的算法为从干涉测量的相位中进行形状重建提供了一种简单的方法。该算法基于对通过被测物体的局部光线转换的分析。我们为在透射和反射两种全息配置下开发了算法。通过实验和广泛的模拟证明了所开发算法的准确性。我们展示了一个全息马赫-曾德尔配置中的实验，我们已经测量并成功重建了高达 0.3 的 NA 的球形和圆柱形微透镜的高度分布。
