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开发并在现场对蜂窝沸石转子浓缩器/蓄热式氧化器进行优化,用于去除半导体工业挥发性有机碳。

Development and field-scale optimization of a honeycomb zeolite rotor concentrator/recuperative oxidizer for the abatement of volatile organic carbons from semiconductor industry.

机构信息

State Environmental Protection Key Laboratory of Environmental Risk Assessment and Control on Chemical Process, School of Resources and Environmental Engineering, East China University of Science and Technology, Shanghai 200237, People's Republic of China.

出版信息

Environ Sci Technol. 2012 Jan 3;46(1):441-6. doi: 10.1021/es203174y. Epub 2011 Dec 6.

DOI:10.1021/es203174y
PMID:22091828
Abstract

The combined concentrator/oxidizer system has been proposed as an effective physical-chemical option and proven to be a viable solution that enables Volatile Organic Carbons (VOCs) emitters to comply with the regulations. In this work, a field scale honeycomb zeolite rotor concentrator combined with a recuperative oxidizer was developed and applied for the treatment of the VOC waste gas. The research shows the following: (1) for the adsorption rotor, zeolite is a more appropriate material than Granular Activated Carbon (GAC). The designing and operation parameters of the concentrator were discussed in detail including the size and the optimal rotation speed of rotor. Also the developed rotor performance's was evaluated in the field; (2) Direct Fired Thermal Oxidizer (DFTO), Recuperative Oxidizer (RO), Regenerative Thermal Oxidizer (RTO) and Regenerative Catalytic oxidizer (RCO) are the available incinerators and the RO was selected as the oxidizer in this work; (3) The overall performance of the developed rotor/oxidizer was explored in a field scale under varying conditions; (4) The energy saving strategy was fulfilled by reducing heat loss from the oxidizer and recovering heat from the exhaust gas. Data shows that the developed rotor/oxidizer could remove over 95% VOCs with reasonable cost and this could be helpful for similar plants when considering VOC abatement.

摘要

组合浓缩/氧化系统已被提议作为一种有效的物理化学选择,并已被证明是一种可行的解决方案,使挥发性有机碳 (VOC) 排放源能够符合法规要求。在这项工作中,开发并应用了一种蜂窝沸石转子浓缩器与蓄热式氧化器相结合的现场规模,用于处理 VOC 废气。研究表明:(1)对于吸附转子,沸石比颗粒活性炭 (GAC) 更合适。详细讨论了浓缩器的设计和操作参数,包括转子的尺寸和最佳转速。还评估了现场开发的转子性能;(2)直接火焰式热氧化器 (DFTO)、蓄热式氧化器 (RO)、再生式热氧化器 (RTO) 和再生式催化氧化器 (RCO) 是可用的焚烧炉,本工作中选择 RO 作为氧化器;(3)在不同条件下,在现场规模上探索了开发的转子/氧化器的整体性能;(4)通过减少氧化器的热损失和回收废气中的热量来实现节能策略。数据表明,开发的转子/氧化器可以以合理的成本去除超过 95%的 VOC,这对于考虑 VOC 减排的类似工厂可能会有所帮助。

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