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通过低温气-液-固化学气相沉积法制备的直径为3纳米的锗纳米线。

Germanium nanowires with 3-nm-diameter prepared by low temperature vapour-liquid-solid chemical vapour deposition.

作者信息

Simanullang Marolop, Usami Koichi, Kodera Tetsuo, Uchida Ken, Oda Shunri

机构信息

Quantum Nanoelectronics Research Center (QNERC), Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8550, Japan.

出版信息

J Nanosci Nanotechnol. 2011 Sep;11(9):8163-8. doi: 10.1166/jnn.2011.5049.

DOI:10.1166/jnn.2011.5049
PMID:22097548
Abstract

We report the growth of germanium nanowires (Ge NWs) with single-step temperature method via vapour-liquid-solid (VLS) mechanism in the low pressure chemical vapour deposition (CVD) reactor at 300 degrees C, 280 degrees C, and 260 degrees C. The catalyst used in our experiment was Au nanoparticles with equivalent thicknesses of 0.1 nm (average diameter approximately 3 nm), 0.3 nm (average diameter approximately 4 nm), 1 nm (average diameter approximately 6 nm), and 3 nm (average diameter approximately 14 nm). The Gibbs-Thomson effect was used to explain our experimental results. The Ge NWs grown at 300 degrees C tend to have tapered structure while the Ge NWs grown at 280 degrees C and 260 degrees C tend to have straight structure. Tapering was caused by the uncatalysed deposition of Ge atoms via CVD mechanism on the sidewalls of nanowire and significantly minimised at lower temperature. We observed that the growth at lower temperature yielded Ge NWs with smaller diameter and also observed that the diameter and length of Ge NWs increases with the size of Au nanoparticles for all growth temperatures. For the same size of Au nanoparticles, Ge NWs tend to be longer with a decrease in temperature. The Ge NWs grown at 260 degrees C from 0.1-nm-thick Au had diameter as small as approximately 3 nm, offering an opportunity to fabricate high-performance p-type ballistic Ge NW transistor, to realise nanowire solar cell with higher efficiency, and also to observe the quantum confinement effect.

摘要

我们报道了在低压化学气相沉积(CVD)反应器中,于300℃、280℃和260℃通过气-液-固(VLS)机制采用单步温度法生长锗纳米线(Ge NWs)的情况。我们实验中使用的催化剂是等效厚度为0.1nm(平均直径约3nm)、0.3nm(平均直径约4nm)、1nm(平均直径约6nm)和3nm(平均直径约14nm)的金纳米颗粒。利用吉布斯-汤姆逊效应来解释我们的实验结果。在300℃生长的Ge NWs往往具有锥形结构,而在280℃和260℃生长的Ge NWs往往具有直的结构。锥形是由Ge原子通过CVD机制在纳米线侧壁上的无催化沉积引起的,并且在较低温度下显著减小。我们观察到在较低温度下生长得到的Ge NWs直径较小,还观察到在所有生长温度下,Ge NWs的直径和长度都随着金纳米颗粒尺寸的增加而增大。对于相同尺寸的金纳米颗粒,Ge NWs的长度往往随着温度降低而增加。在260℃由0.1nm厚的金生长得到的Ge NWs直径小至约3nm,这为制造高性能p型弹道Ge NW晶体管、实现更高效率的纳米线太阳能电池以及观察量子限制效应提供了机会。

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